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College of Electrical Engineering and Computer Science / 電機資訊學院
Electrical Engineering / 電機工程學系
High Throughput UHV/CVD SiGe and SiGe:C Process for sige HBT and strained Si FET
Details
High Throughput UHV/CVD SiGe and SiGe:C Process for sige HBT and strained Si FET
Journal
2002 Semiconductor Manufacturing Technology Workshop, SMTW 2002
Pages
145-148
Date Issued
2002
Author(s)
Chen, P.S.
Tseng, Y.T.
Tsai, M.-J.
CHEE-WEE LIU
DOI
10.1109/SMTW.2002.1197395
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/502126
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84958183678&doi=10.1109%2fSMTW.2002.1197395&partnerID=40&md5=aa1be96f8ca767e34a34a6b9adb1d23a
Type
conference paper
