Photo-assisted local oxidation of GaN using an atomic force microscope

Journal

Nanotechnology

Journal Volume

17

Journal Issue

13

Pages

3299-3303

Date Issued

2006

Author(s)

Hwang, J.S.

Hu, Z.S.

Lu, T.Y.

Chen, L.W.

Chen, S.W.

Lin, T.Y.

Hsiao, C.-L.

Chen, K.-H.

DOI

10.1088/0957-4484/17/13/036

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/503399

SDGs

[SDGs]SDG9

Publisher

Institute of Physics Publishing

Type

journal article