https://scholars.lib.ntu.edu.tw/handle/123456789/503417
Title: | Superior electrochemical performance of CNx nanotubes using TiSi2 buffer layer on Si substrates | Authors: | Fang, W.-C. Huang, J.-H. Sun, C.-L. Chen, L.-C. Papakonstantinou, P. Chen, K.-H. |
Issue Date: | 2006 | Publisher: | American Institute of Physics | Journal Volume: | 24 | Journal Issue: | 1 | Start page/Pages: | 87-90 | Source: | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/503417 | ISSN: | 10711023 | DOI: | 10.1116/1.2141627 |
Appears in Collections: | 凝態科學研究中心 |
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