Multiscale, hierarchical integration of soft polymer micro- and nanostructures into optical MEMS

Journal

Optical Nano and Micro Actuator Technology

Pages

491-518

Date Issued

2017

Author(s)

Kurabayashi, K.

Huang, N.-T.

Tung, Y.-C.

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/506086

https://doi.org/10.1201/b13892

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85051754546&doi=10.1201%2fb13892&partnerID=40&md5=ab3e32741b6f5a4a63a1bf01a16efee5

Type

book part