Precision positioning control of a long-stroke stage employing multiple switching control
Journal
Microsystem Technologies
Journal Volume
https://www.scopus.com/inward/record.url?eid=2-s2.0-85078456114&partnerID=40&md5=6291e6b16e13c2c602a17cecf357947e
28
Journal Issue
2-s2.0-85078456114
Date Issued
2022
Author(s)
Type
journal article