A novel single-actuator bistable microdevice with a moment-driven mechanism
Journal
Sensors and Actuators, A: Physical
Journal Volume
310
Date Issued
2020
Author(s)
Abstract
This work presents a moment-driven bistable microdevice that requires only one actuator to switch between the device's two stable states. The proposed device, which is a significantly improved version of our previous work, consists of two simple MEMS structures: a curved-beam structure and a V-beam actuator. Because the device is actuated by external moments, it consumes a smaller device area, and is less complex. In addition, the proposed device does not require latching mechanisms to lock the states. The closed-form design criteria for the proposed device were derived and validated with experimental measurement results. Transient bistable switching behaviors of the device were measured by using a vibrometer. Preliminary measurement results showed that the device can reliably switch between two stable states at 40 Hz with an actuation voltage of 10 V.
SDGs
Type
journal article