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College of Electrical Engineering and Computer Science / 電機資訊學院
Computer Science and Information Engineering / 資訊工程學系
AFM Tip Localization on Large Range Sample Using Particle Filter for MEMS Inspection
Details
AFM Tip Localization on Large Range Sample Using Particle Filter for MEMS Inspection
Journal
Proceedings of the American Control Conference
Journal Volume
2020-July
Pages
577-582
Date Issued
2020
Author(s)
Liu, Y.-L.
Huang, K.-W.
Huang, C.-C.
Chen, H.-C.
LI-CHEN FU
DOI
10.23919/ACC45564.2020.9147562
URI
https://www.scopus.com/inward/record.url?eid=2-s2.0-85089600994&partnerID=40&md5=59cb89bf2dd6741ec1b035e0b812cfd5
https://scholars.lib.ntu.edu.tw/handle/123456789/559096
Type
conference paper