https://scholars.lib.ntu.edu.tw/handle/123456789/577081
標題: | Experimental Study on Frequency Stability of Micromechanical Resonators Operating in the Nonlinear Tapping Mode | 作者: | Tsai C.-P Liu J.-R Li W.-C. WEI-CHANG LI |
關鍵字: | Frequency stability; Microelectromechanical devices; Stability; Bifurcation points; Electrical current; Frequency transmissions; MEMS resonators; Non-linear springs; Operating points; Repulsive forces; Tapping modes; Micromechanical resonators | 公開日期: | 2020 | 來源出版物: | IFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings | 摘要: | Frequency stability of micromechanical resonators operating in the nonlinear tapping mode was investigated. In particular, a CC-beam oxide-rich resonator based on a CMOS-MEMS process platform exhibits higher frequency stability at the bifurcation points in the nonlinear tapping frequency transmissions, yielding a ?2× improvement of short-term Allen deviation compared to that at the midpoint of the tapping regime and that operating under the regular nonlinear spring softening (not entering the tapping mode yet). Differing from the previous studies on stability of MEMS resonators in either nonlinear softening or hardening condition [1] [2], this work explores the frequency stability deeper into the tapping mode of MEMS resonators - essentially behaving as resoswitches with no electrical current flowing through the contact - where the devices are subject to highly nonlinear repulsive forces due to impact. The results would help facilitate not only the understanding of the nonlinear dynamics of resoswitches but also the determination of optimum operating points of the devices. ? 2020 IEEE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85096991797&doi=10.1109%2fIFCS-ISAF41089.2020.9234814&partnerID=40&md5=8d3836931d9753fff1f4562efe9e0d04 https://scholars.lib.ntu.edu.tw/handle/123456789/577081 |
DOI: | 10.1109/IFCS-ISAF41089.2020.9234814 |
顯示於: | 應用力學研究所 |
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