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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Micromachining of Mesoporous Oxide Films for MEMS Structures
Details
Micromachining of Mesoporous Oxide Films for MEMS Structures
Journal
Journal of Materials Research
Journal Volume
17
Pages
2121-2129
Date Issued
2002
Author(s)
J.-A. Paik
S.-K. Fan
C.-J. Kim
M. C. Wu
B. Dunn
SHIH-KANG FAN
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/583976
Type
journal article
