In-situ scanning white light interferometry employing dual-sensing optical configuration and active fringe-locking strategy

Journal

International Journal of Nanomanufacturing (IJNM)

Journal Volume

8

Journal Issue

1/2(2012)

Pages

pp. 40-53

Date Issued

2012

Author(s)

Liang-Chia Chen

Sheng-Lih Yeh

Abraham Mario Tapilouw

Kun-Feng Lee

URI

Type

journal article