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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Study on the fabrication of CMOS-MEMS and the computer-aided MEMS design
Details
Study on the fabrication of CMOS-MEMS and the computer-aided MEMS design
Journal
Bulletin of the College of Engineering, N. T. U
Journal Volume
91
Pages
P.21-P.32
Date Issued
2005
Author(s)
Cheng, Y.-C.
Lee, C.-Y.
Chang, P. Z.
Chen, Ping-Hei
PING-HEI CHEN
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/584690
Type
journal article