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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Conceptual Design of Planar Retainer Mechanisms for Bottom Opening Wafer Transport Container in SMIF Environment
Details
Conceptual Design of Planar Retainer Mechanisms for Bottom Opening Wafer Transport Container in SMIF Environment
Journal
第六屆機構與機器設計學術研討會
Date Issued
2003
Author(s)
Pai, Wei-Ming
DAR-ZEN CHEN
Lee, Jyh-Jone
Wu, Tzong-Ming
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/586282
Type
conference paper