https://scholars.lib.ntu.edu.tw/handle/123456789/586443
Title: | High-Speed and Large-Range Scanner Integrated with Astigmatic Detection System for Atomic Force Microscopy | Authors: | Ren-Feng Ding Hsuan-Fu Huang Biing-Chwen Chang Hsien-Shun Liao Chih-Wen Yang En-Te Hwu Kuang-Yuh Huang Chia-Seng Chang |Ing-Shouh Hwang KUANG-YUH HUANG |
Issue Date: | 2014 | Source: | 17th International Conference on Non-contact Atomic Force Microscopy | Description: | Tsukuba, Japan |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/586443 |
Appears in Collections: | 機械工程學系 |
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