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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
Surface Integrity of Si Wafer in Ultra Precision Machining
Details
Surface Integrity of Si Wafer in Ultra Precision Machining
Journal
Int. J. of Adv. Manuf. Technology
Journal Volume
29
Journal Issue
3-4
Pages
372-378
Date Issued
2006
Author(s)
楊宏智
廖錫田
黃弘毅
HONG-TSU YOUNG
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/587651
Type
journal article
