https://scholars.lib.ntu.edu.tw/handle/123456789/587754
Title: | A Novel Fabrication Method for Suspended High-Aspect-Ratio MEMS Structures | Authors: | Y.-J. Yang W.-C. Kuo YAO-JOE YANG |
Issue Date: | 2005 | Journal Volume: | 15 | Start page/Pages: | 2184-2193 | Source: | Journal of Micromechanics and Microengineering (JMM) | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/587754 |
Appears in Collections: | 機械工程學系 |
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