Pull-in Dynamics of Electrostatically-Actuated microstructures

Journal

1996 Solid-State Sensor and Actuator Workshop,

Date Issued

1996

Author(s)

R. K. Gupta

Y.-J. Yang

E. S. Hung

G. K. Ananthasuresh

S. D. Senturia,

URI

Description

Late News, Hilton Head, SC

Type

conference paper