Extraction of Frequency Dependent Macromodels for MEMS Squeeze-film Damping Effects

Journal

Journal of Mechanics

Journal Volume

21

Journal Issue

4

Pages

227-234

Date Issued

2005

Author(s)

Y.-J. Yang

C.-M. Chien

M. Kamon

V. L. Rabinovich

J. R. Gilbert

DOI

10.1017/s1727719100000666

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/587823

https://www.scopus.com/inward/record.uri?eid=2-s2.0-29744451546&doi=10.1017%2fs1727719100000666&partnerID=40&md5=81aab227733d45398d88f7d08ccc6031

Type

journal article