https://scholars.lib.ntu.edu.tw/handle/123456789/587856
Title: | A Single-run Single-mask ICP-RIE Process for Fabricating Suspended High-Aspect-Ratio MEMS Structures | Authors: | Y.-J. Yang W.-C. Kuo K.-C. Fan YAO-JOE YANG |
Issue Date: | 2006 | Journal Volume: | 45 | Journal Issue: | 1A | Start page/Pages: | 305-310 | Source: | Japanese Journal of Applied Physics | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/587856 |
Appears in Collections: | 機械工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.