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College of Engineering / 工學院
Mechanical Engineering / 機械工程學系
A Microelectromechanical Digital-to-Analog Converter As The Step-Motion Reference Mirror for A White-Light Interferometry System
Details
A Microelectromechanical Digital-to-Analog Converter As The Step-Motion Reference Mirror for A White-Light Interferometry System
Journal
IEEE NEMS 2010
Pages
546-549
Date Issued
2010
Author(s)
H.-H. Liao
Y.-J. Yang
YAO-JOE YANG
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/587867
Description
Xiamen, China
Type
conference paper
