https://scholars.lib.ntu.edu.tw/handle/123456789/587867
Title: | A Microelectromechanical Digital-to-Analog Converter As The Step-Motion Reference Mirror for A White-Light Interferometry System | Authors: | H.-H. Liao Y.-J. Yang YAO-JOE YANG |
Issue Date: | 2010 | Start page/Pages: | 546-549 | Source: | IEEE NEMS 2010 | Description: | Xiamen, China |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/587867 |
Appears in Collections: | 機械工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.