|Title:||Local stress determination in shallow trench insulator structures with one side and two sides pad SiN layer by polarized micro-Raman spectroscopy extraction and mechanical modelization||Authors:||M. H. Liao
|Issue Date:||2009||Start page/Pages:||093511-093513||Source:||J. Appl. Phys||URI:||https://scholars.lib.ntu.edu.tw/handle/123456789/590707|
|Appears in Collections:||機械工程學系|
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