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College of Engineering / 工學院
Engineering Science and Ocean Engineering / 工程科學及海洋工程學系
Fabrication of metrology test structures with programmed imperfection using helium ion beam direct write
Details
Fabrication of metrology test structures with programmed imperfection using helium ion beam direct write
Journal
2016 ZEISS Korea Microscopy Workshop
Date Issued
2016
Author(s)
JIA-HAN LI
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/590850
Type
conference paper