https://scholars.lib.ntu.edu.tw/handle/123456789/590880
標題: | Solution-refined method for solving large-scale electrostatic problems: Taking the electron-beam direct-write lithography system as an example | 作者: | Yen-Min Lee JIA-HAN LI Tony Wen-Hann Sheu Kuen-Yu Tsai Jia-Yu Yen |
公開日期: | 2013 | 來源出版物: | 13rd Conference on Computational Mathematics and Annual Meetings of TWSIAM | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/590880 |
顯示於: | 工程科學及海洋工程學系 |
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