https://scholars.lib.ntu.edu.tw/handle/123456789/590893
標題: | Optical metrology of shape-varying nano-patterned gratings by analyzing the scattering signals in their pupil images | 作者: | Yen-Min Lee JIA-HAN LI Fu-Min Wang Hsin-Hung Cheng Yu-Tian Shen Kuen-Yu Tsai Alek C. Chen |
公開日期: | 2011 | 來源出版物: | 24th International Microprocesses and Nanotechnology Conference (MNC 2011) | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/590893 |
顯示於: | 工程科學及海洋工程學系 |
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