https://scholars.lib.ntu.edu.tw/handle/123456789/590900
標題: | Iterative finite-difference method for analyzing fabrication errors of lens-misaligned electron-beam direct-write lithography system | 作者: | Yen-Min Lee JIA-HAN LI Sheng-Yung Chen Shiau-Yi Ma Kuen-Yu Tsai Tony Wen-Hann Sheu Jia-Yush Yen |
公開日期: | 2010 | 來源出版物: | 23rd International Microprocesses and Nanotechnology Conference (MNC 2010) | URI: | https://www.researchgate.net/profile/Sheng-Yung-Chen-2/publication/277305022_Iterative_finite-difference_method_for_analyzing_fabrication_errors_of_lens-misaligned_electron-beam_direct-write_lithography_system/links/5721797b08ae5454b23107df/Iterative-finite-difference-method-for-analyzing-fabrication-errors-of-lens-misaligned-electron-beam-direct-write-lithography-system.pdf https://scholars.lib.ntu.edu.tw/handle/123456789/590900 |
顯示於: | 工程科學及海洋工程學系 |
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