https://scholars.lib.ntu.edu.tw/handle/123456789/598887
標題: | High haze Ga and Zr co-doped zinc oxide transparent electrodes for photovoltaic applications | 作者: | Wu C.-Y Chiu L.-C Juang J.-Y. JIA-YANG JUANG |
關鍵字: | Atmospheric pressure plasma jet (APPJ);Co-doped ZnO;Haze;Solar cells;Transparent conductive oxide (TCO);Atmospheric pressure;Crystallinity;Deterioration;II-VI semiconductors;Semiconductor doping;Solar power generation;Textures;Transparent electrodes;Zinc oxide;Atmospheric pressure plasma jet;Atmospheric pressure plasma jets;Co-doped;Doped zinc oxides;Photovoltaic applications;Transparent conductive oxide;Transparent conductive oxides;Transparent electrode;Surface roughness | 公開日期: | 2022 | 卷: | 901 | 來源出版物: | Journal of Alloys and Compounds | 摘要: | Creating textured front electrodes to improve optical path length is promising to enhance the power conversion efficiency of solar cells. Deposition of transparent conductive oxides with textured surfaces usually requires additional processing steps, such as etching and coating nanoparticles. However, this makes the process complicated and inefficient. We demonstrate a one-step fabrication process to deposit high haze gallium and zirconium co-doped zinc oxides (GZO:Zr) prepared by atmospheric pressure plasma jets. GZO:Zr (2 at%) films achieve a low resistivity (7.88 × 10–4 Ω cm), a high haze (34.8%), and a great FoM (8.22 × 10?3 Ω?1). The haze factor increases from 7.19% to 34.8% (+384%) when 2% Zr is doped into GZO films. Such an enhancement of haze is attributed to the increased surface roughness and deterioration of crystallinity. AFM results show that roughness increases from 18.4 to 122 nm after 2% Zr is doped. SEM images show that spherical particles appeared on the film surface when Zr was doped into GZO films. Unlike conventional methods, our method produces hazy transparent electrodes in one step without changing any operational parameters and is suitable for industrial-scale mass production. Our findings pave the way for new applications of co-doping in transparent conductive oxides. ? 2022 Elsevier B.V. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85122622647&doi=10.1016%2fj.jallcom.2022.163678&partnerID=40&md5=0ff91f94ee4aeee9a47ffc35e06f7ba3 https://scholars.lib.ntu.edu.tw/handle/123456789/598887 |
ISSN: | 09258388 | DOI: | 10.1016/j.jallcom.2022.163678 |
顯示於: | 機械工程學系 |
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