https://scholars.lib.ntu.edu.tw/handle/123456789/598898
標題: | Tapping Bandwidth Widening of CMOS-MEMS Vibro-Impacting Resonators Based on Double-Sided Stopper Structures | 作者: | Tsai C.-P Wang H.-W Li W.-C. WEI-CHANG LI |
關鍵字: | MEMS;nonlinear frequency response;resoswitch;tapping mode;vibro-impact;vibro-impacting resonators;Actuators;Bandwidth;CMOS integrated circuits;Microsystems;Natural frequencies;Resonators;Stiffness;Transmissions;Additional stiffness;Bandwidth widening;Effective stiffness;Frequency transmissions;Higher frequencies;Resonance frequencies;Resonator effects;Transmission response;Solid-state sensors | 公開日期: | 2021 | 起(迄)頁: | 1387-1391 | 來源出版物: | 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 | 摘要: | A CMOS-MEMS based vibro-impacting resonator with double sided stopper structures has been demonstrated that exhibits a wider tapping bandwidth up to 2.3× compared to the conventional single sided counterpart. In particular, a folded-beam capacitive-comb transduced resonator fabricated using a 0.35- m CMOS process is driven impacts the stopper structure on either side of the shuttle with an air gap of 0.6 and results in a flat region in the frequency transmission response, where the tapping occurs, around the resonance frequency of 125 kHz. The effective stiffness of the system and therefore the resonance frequency abruptly increase during tapping, leading to duffed transmission response curves towards higher frequency. Conceptually, the addition stopper in the doubled-sided impacting resonator effects additional stiffness hardening that in turn pushes the impact induced resonance frequency even further. A numerical model established here arrives the same trend about tapping bandwidth widening in the structure with double-sided stoppers. ? 2021 IEEE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85114963669&doi=10.1109%2fTransducers50396.2021.9495575&partnerID=40&md5=9215370ad08c9c7e55cb369ccc97c0c8 https://scholars.lib.ntu.edu.tw/handle/123456789/598898 |
DOI: | 10.1109/Transducers50396.2021.9495575 |
顯示於: | 應用力學研究所 |
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