Tapping Bandwidth Widening of CMOS-MEMS Vibro-Impacting Resonators Based on Double-Sided Stopper Structures
Journal
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Pages
1387-1391
Date Issued
2021
Author(s)
Abstract
A CMOS-MEMS based vibro-impacting resonator with double sided stopper structures has been demonstrated that exhibits a wider tapping bandwidth up to 2.3× compared to the conventional single sided counterpart. In particular, a folded-beam capacitive-comb transduced resonator fabricated using a 0.35- m CMOS process is driven impacts the stopper structure on either side of the shuttle with an air gap of 0.6 and results in a flat region in the frequency transmission response, where the tapping occurs, around the resonance frequency of 125 kHz. The effective stiffness of the system and therefore the resonance frequency abruptly increase during tapping, leading to duffed transmission response curves towards higher frequency. Conceptually, the addition stopper in the doubled-sided impacting resonator effects additional stiffness hardening that in turn pushes the impact induced resonance frequency even further. A numerical model established here arrives the same trend about tapping bandwidth widening in the structure with double-sided stoppers. ? 2021 IEEE.
Subjects
MEMS
nonlinear frequency response
resoswitch
tapping mode
vibro-impact
vibro-impacting resonators
Actuators
Bandwidth
CMOS integrated circuits
Microsystems
Natural frequencies
Resonators
Stiffness
Transmissions
Additional stiffness
Bandwidth widening
Effective stiffness
Frequency transmissions
Higher frequencies
Resonance frequencies
Resonator effects
Transmission response
Solid-state sensors
Type
conference paper