https://scholars.lib.ntu.edu.tw/handle/123456789/598900
標題: | Micromechanical Vibro-Impact Resonator-Enabled Sensing Applications | 作者: | Li W.-C. WEI-CHANG LI |
關鍵字: | atomic force microscopy;MEMS resonator;nonlinearity;resoswitch;tapping-mode resonator;vibro-impact resonator;Vibro-impact system;Actuators;Condition monitoring;Microsystems;Solid-state sensors;Electrical switching;Frequency reference;Linear resonator;Micro-mechanical;Nonlinear regions;Resonator structures;Sensing applications;Zero Standby Power;Micromechanical resonators | 公開日期: | 2021 | 起(迄)頁: | 609-613 | 來源出版物: | 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 | 摘要: | Micromechanical vibro-impact resonators, for which the devices operate in the highly nonlinear region where the resonator structures physically impact the output electrodes or stoppers, have enabled various unique applications beyond the timing and frequency references that use regular linear resonators. In particular, resoswitches, which utilize vibro-impact resonators with conductive structures to achieve periodic electrical switching, have been demonstrated in cases of receiving RF signal [1]-[6] and sound wave [7] with zero standby power needed. In addition, the contact surface dependent nonlinear dynamics of vibro-impact resonators has shown the potential in setting up a new metrology platform to perform on-chip, in situ surface condition monitoring for MEMS device sidewall surfaces [8] [9]. By going through the developments of the above mentioned vibro-impact devices and circuits, this paper discusses the worklist that needs to be done in moving the technology forward. ? 2021 IEEE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85114965035&doi=10.1109%2fTransducers50396.2021.9495409&partnerID=40&md5=e04387e907352fb1a0e16263f04f72d4 https://scholars.lib.ntu.edu.tw/handle/123456789/598900 |
DOI: | 10.1109/Transducers50396.2021.9495409 |
顯示於: | 應用力學研究所 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。