https://scholars.lib.ntu.edu.tw/handle/123456789/599025
標題: | A Wireless Cardiovascular Pressure Sensor Based on an Iontronic Film with High Sensitivity | 作者: | Cai M.-X Yang Y.-J. YAO-JOE YANG |
關鍵字: | Electron Double Layer;Iontronic Film;LC resonator;Phase-dip Technique;Wireless Pressure Sensor;Capacitance;Mechanics;Natural frequencies;Pressure sensors;Applied pressure;Device performance;High sensitivity;Parallel plate capacitors;Pressure sensing;Pressure sensitivities;Ultra sensitives;Wireless pressure sensors;MEMS | 公開日期: | 2021 | 卷: | 2021-January | 起(迄)頁: | 135-138 | 來源出版物: | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 摘要: | This work presents an ultra-sensitive iontronic wireless pressure sensor. The device consists of an inductor coil and a parallel-plate capacitor for pressure sensing. A microstructured iontronic film, which was embedded on the capacitor as dielectric layer, was the key element for enhancing the device performance. Assisted by the ultrahigh capacitance of electron double layers forming at the iontronic film/electrode interface, the sensitivity of the proposed device can be remarkably increased. Externally applied pressure on the device changes the capacitance, and then induces a shift in resonant frequency, which can be wirelessly retrieved by using the phase-dip technique. The measured pressure sensitivity of the proposed device was 0.014 mmHg, which is about 50 times larger than that of the device without iontronic film. ? 2021 IEEE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85103468585&doi=10.1109%2fMEMS51782.2021.9375383&partnerID=40&md5=329c9c7e6a92fe459c3c7cc9e380f790 https://scholars.lib.ntu.edu.tw/handle/123456789/599025 |
ISSN: | 10846999 | DOI: | 10.1109/MEMS51782.2021.9375383 |
顯示於: | 機械工程學系 |
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