Real-time fab-wise airborne molecular contaminant (AMC) monitoring system using multiple fourier transform infrared (FTIR) spectrometers in a semiconductor plant

Journal

Aerosol and Air Quality Research

Journal Volume

15

Journal Issue

4

Pages

1640-1651

Date Issued

2015

Author(s)

Tsao Y.-C.

Chang P.-E.

Chen S.-Y.

DOI

10.4209/aaqr.2014.08.0184

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84938338579&doi=10.4209%2faaqr.2014.08.0184&partnerID=40&md5=4f9226c71dd79e0c1ad34c8f46f67977

https://scholars.lib.ntu.edu.tw/handle/123456789/603354

Publisher

AAGR Aerosol and Air Quality Research

Type

journal article