https://scholars.lib.ntu.edu.tw/handle/123456789/607033
Title: | Mid-infrared photodetection enhanced by localized surface plasmon resonance assisted NiSi/Si Schottky photodetectors | Authors: | Syu H.-J Su Z.-C Sun R.-L Lai H.-H CHING-FUH LIN |
Keywords: | Inverted pyramid arrays;Mid-infrared;NiSi;Schottky;Surface plasmon resonance;Infrared detectors;Nickel compounds;Photons;Silicon compounds;Array structures;Inverted pyramid array;Localized surface plasmon resonance;Mid-infrared regions;Midinfrared;Photoresponses;Pyramid arrays;Schottky photodetectors;Surface-plasmon resonance | Issue Date: | 2021 | Source: | 2021 IEEE Research and Applications of Photonics in Defense Conference, RAPID 2021 | Abstract: | Here, inverted-pyramid array structures (IPAS) are applied on NiSi/n-Si Schottky photodetectors to generate surface plasmon resonance and improve the photoresponse in mid-infrared region. Consequently, compared with the planar devices, the current response of 8-μm-period IPAS devices increases 4.08 times in 3.2-μm light illumination. ? 2021 IEEE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85115434606&doi=10.1109%2fRAPID51799.2021.9521452&partnerID=40&md5=09695bf9c9d86829b734a97fc21fa263 https://scholars.lib.ntu.edu.tw/handle/123456789/607033 |
DOI: | 10.1109/RAPID51799.2021.9521452 |
Appears in Collections: | 電機工程學系 |
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