https://scholars.lib.ntu.edu.tw/handle/123456789/607140
標題: | OpenMPL: An Open-Source Layout Decomposer | 作者: | Li W Ma Y Sun Q Zhang L Lin Y Jiang I.H.-R Yu B HUI-RU JIANG |
關鍵字: | Design methodology;layout decomposition;VLSI design;Design;Electronics engineering;Advanced technology;Decomposition problems;Design closure;High-quality solutions;Layout decomposition;Multiple patterning;Processing steps;VLSI manufacturing;Integrated circuits | 公開日期: | 2021 | 卷: | 40 | 期: | 11 | 起(迄)頁: | 2331-2344 | 來源出版物: | IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems | 摘要: | Multiple patterning lithography has been widely adopted in advanced technology nodes of VLSI manufacturing. As a key step in the design flow, multiple patterning layout decomposition (MPLD) is critical to design closure. Due to the $\mathcal {N} \mathcal {P} $ -hardness of the general decomposition problem, various efficient algorithms have been proposed with high-quality solutions. However, with increasingly complicated design flow and peripheral processing steps, developing a high-quality layout decomposer becomes more and more difficult, slowing down further advancement in this field. This article presents $\mathsf {OpenMPL}$ (2020), an open-source layout decomposition framework, with well-separated peripheral processing and core solving steps. Besides, previous algorithms or techniques are inspected and several issues are discovered. We then propose corresponding new algorithms to resolve these issues. The experiments demonstrate the effectiveness of our proposed algorithms and the efficiency of $\mathsf {OpenMPL}$. ? 1982-2012 IEEE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85097937426&doi=10.1109%2fTCAD.2020.3042175&partnerID=40&md5=7ac396b3fe2761a2f85c5e48dd2ab5fc https://scholars.lib.ntu.edu.tw/handle/123456789/607140 |
ISSN: | 02780070 | DOI: | 10.1109/TCAD.2020.3042175 |
顯示於: | 電機工程學系 |
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