Development of a Precision Linear and Rotary Stage Technique
Journal
Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao
Journal Volume
38
Journal Issue
2
Pages
173-178
Date Issued
2017
Author(s)
Abstract
In recent years, semiconductor and biotechnology industries have put significant energy into changing linear processing equipment (X-Y-Z) into R2R (roll to roll) processing equipment. The R2R processing equipment can improve the manufacturing efficiency and reduce the cost of equipment. Consequently, angular positioning accuracy has become more important in precision mechanical equipment. This study presents the development of a precision linear and rotary stage technique applied on roller mold processing, composed of a precision rotary stage, a precision linear stage, a piezoelectric compensation stage, an angular encoder (resolution: 0.269 arc-sec per count), a spherical lens measurement system, and a multi-DOF (degree of freedom) laser interferometer measurement system (resolution: 10 nm per count). The system was integrated using a Matlab and dSPACE control interface with the Proportional Integral Derivative controller (PID controller). The compensated control results of the stage's rotary positioning accuracy, eccentric and wobble accuracy, and linear positioning accuracy are about ±0.4 arc-sec, ±5 ?m, and ±100 nm respectively. ? 2017, Chinese Mechanical Engineering Society. All right reserved.
Subjects
Degrees of freedom (mechanics)
Equipment
Interferometers
Laser interferometry
Piezoelectricity
Proportional control systems
Three term control systems
Two term control systems
Angular positioning
Biotechnology industry
Laser interferometer measurements
Manufacturing efficiency
Mechanical equipment
Positioning accuracy
Processing equipment
Proportional integral derivative controllers
Controllers
Type
journal article