https://scholars.lib.ntu.edu.tw/handle/123456789/611910
標題: | Control of a long-stroke precision scanning stage | 作者: | Shen J.-C. Wu C.-H. Chen B.-Y. Jywe W.-Y. Wen-Yuh Jywe |
關鍵字: | Degrees of freedom (mechanics);Errors;Interferometers;Laser interferometry;Linear motors;Piezoelectric actuators;Piezoelectricity;Proportional control systems;Sliding mode control;Three term control systems;High precision positioning;Integral sliding mode;Laser interferometer measurements;Long strokes;Precision positioning;Precision stage;Root-mean-square errors;Two degrees of freedom;Controllers | 公開日期: | 2014 | 起(迄)頁: | 311-315 | 來源出版物: | 2014 22nd Mediterranean Conference on Control and Automation, MED 2014 | 摘要: | This study presents the control of a long-stroke precision scanning stage. The stage considered is combined by a linear motor-driven long-stroke stage (X, Y) and a piezoelectric-driven two degrees of freedom (2-DOF) nano-stage (Y, θZ). Therefore, it can provide long-stroke and high-precision positioning. The feedback signal for this stage is obtained using a 3-DOF laser interferometer measurement system. Integral sliding-mode controllers are used to control the linear motor-driven stage and PID controllers are used to control the piezo-stage for precision positioning. This paper presents the design of the controllers and the control results. Experimental results show that when X-axis scanned at speed 100mm/s, the averaged error and root mean square (RMS) error for y positioning are 10.6 nm and 13.1 nm and the averaged error and RMS error of θZ are 0.17 and 0.22 respectively. ? 2014 IEEE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84916925329&doi=10.1109%2fMED.2014.6961389&partnerID=40&md5=95f1a5a4ada5e3de54eba4110b65c499 https://scholars.lib.ntu.edu.tw/handle/123456789/611910 |
DOI: | 10.1109/MED.2014.6961389 |
顯示於: | 機械工程學系 |
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