https://scholars.lib.ntu.edu.tw/handle/123456789/611929
標題: | Development of the precision long-stroke 3-DOF nano-stage for the photonic crystal process | 作者: | Jywe W.-Y. Liu C.-H. Lin B.-J. Lee M.-T. Lee J.-D. Teng Y.-F. Hsieh T.-H. Wen-Yuh Jywe |
關鍵字: | Angular errors;Arbitrary patterns;Automatic focusing;Defocusing;High precision positioning;Horizon control;Laser direct writing;Laser direct writing system;Laser interferometer;Multi degrees of freedom;Nano-imprinting;Nano-precision stage;Nano-stage;Optical limits;Precision stage;Process speed;Writing instruments;Control systems;Crystal cutting;Crystal structure;Interferometers;Laser interferometry;Photonic crystals;Piezoelectric motors;Precision engineering | 公開日期: | 2011 | 卷: | 7997 | 來源出版物: | Proceedings of SPIE - The International Society for Optical Engineering | 摘要: | In this paper, it develops a precision long-stroke 3-DOF nano-stage for the nano photonic crystal process. It integrates a linear motor driven long-stroke stage, a piezoelectric driven three-degrees-of-freedom (3-DOF) nano stage, multi-degrees-of-freedom (MDOF) laser interferometer measurement system and their control systems. The long-stroke nano-stage is a hybrid precision stage that can provide long-stroke and high precision positioning. The common focus horizon regulation system is used to keep the parallelism between writing instrument and the target while the laser direct writing instrument is used to write the nano structure needed. Furthermore, the automatic focusing and horizon control system can compensate the defocusing and angular errors that caused by machining automatically. With this precision 3-DOF nano-stage, the laser direct writing system can improve the process speed, overcome the optical limit of interference to reduce the writing spot, generate arbitrary patterns. ? 2011 SPIE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-79960412151&doi=10.1117%2f12.888361&partnerID=40&md5=0c1c97e33d9c2c7fb148c69f3eda06f0 https://scholars.lib.ntu.edu.tw/handle/123456789/611929 |
DOI: | 10.1117/12.888361 |
顯示於: | 機械工程學系 |
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