Improvement of the nonlinear dynamic response of a Z-tilts lead zirconate titanate-based compensation stage using the capacitor insertion method
Journal
Review of Scientific Instruments
Journal Volume
80
Journal Issue
11
Date Issued
2009
Author(s)
Abstract
This paper presents a Z-tilts compensation stage with three piezoelectric actuators and three guided hinges, which are a combination of a two-dimensional rotational hinge and a spring-type hinge. In order to reduce the nonlinearity of the three piezoelectric actuators, the capacitor insertion method was applied on each piezoelectric actuator. The relationship between the improved nonlinearity and the decreased displacement with various inserted capacitors is discussed and suitable capacitors for the stage are determined. A three-dimensional feedback measuring system composed of a laser interferometer and a quadrant photodiode detector was used to directly measure the real working position of the platform of the Z-tilts compensation stage without measuring the individual displacement of the three piezoelectric actuators. The minimum displacement and angular displacement of the Z-tilt stage were ±10 nm and ±0.1 arc sec, respectively. The error of the dynamic response of z, θx, and θy with amplitudes of 3 μm of a sine wave at 30 Hz were ±70 nm, ±0.1 arc sec, and ±0.4 arc sec, respectively, with the capacitor insertion method and a simple proportional-integral controller. ? 2009 American Institute of Physics.
Subjects
Angular displacement
Insertion methods
Laser interferometer
Lead zirconate titanate
Measuring systems
Non-Linearity
Nonlinear dynamic response
Proportional integral controllers
Quadrant photodiode detectors
Sine-wave
Cantilever beams
Capacitance
Capacitors
Cavity resonators
Dynamic response
Feedback
Interferometers
Laser interferometry
Piezoelectric transducers
Piezoelectricity
Piezoelectric actuators
SDGs
Type
journal article