Surface micromachined adjustable micro-concave mirror for bio-detection applications
Journal
Chinese Physics Letters
Journal Volume
26
Journal Issue
8
Date Issued
2009
Author(s)
Abstract
We present a bio-detection system integrated with an adjustable micro-concave mirror. The bio-detection system consists of an adjustable micro-concave mirror, micro flow cytometer chip and optical detection module. The adjustable micro-concave mirror can be fabricated with ease using commercially available MEMS foundry services (such as multiuser MEMS processes, MUMPs) and its curvature can be controlled utilizing thermal or electrical effects. Experimental results show that focal lengths of the micro-concave mirror ranging from 313.5 to 2275.0 μm are achieved. The adjustable micro-concave mirror can be used to increase the efficiency of optical detection and provide a high signal-to-noise ratio. The developed micro-concave mirror is integrated with a micro flow cytometer for cell counting applications. Successful counting of fluorescent-labeled beads is demonstrated using the developed method. ? 2009 Chinese Physical Society and IOP Publishing Ltd.
SDGs
Other Subjects
Flow measurement; Flowmeters; Signal to noise ratio; Biodetection; Concave mirror; Detection modules; Detection system; Electrical effects; MEMS process; Micro flow cytometers; Multiusers; Optical detection; Thermal; Mirrors
Type
journal article