Development of the nano-measuring machine stage
Journal
IECON Proceedings (Industrial Electronics Conference)
Pages
2970-2973
Date Issued
2007
Author(s)
Abstract
In this paper, it was successfully developed a nano-measuring machine stage. It was used the features of a flexible structure to develop the nano-measuring machine stage. This stage includes two parts: one is a long range positioning X-Y stage and the other one is a four degrees-of-freedomicro-range stage. The flexible structure of the four degrees-of-freedom micro-range stage was included two kinds of an arc flexible body and a new two degrees-of-freedom flexible body. The micro-range stage was designed to compensate the moving errors such as vertical straightness error, pitch error and roll errors and its all moving range is 20mm × 20mm × 11μm. Precision feedback is provided by the six degrees-of-freedom measuring system with integrating the three plane mirror interferometers and a two degrees-of-freedom angular sensor. ?2007 IEEE.
Subjects
Annual conference
Flexible bodies
Long range
Measuring systems
Moving range
Straightness error
X-Y stage
Electronics industry
Errors
Flexible structures
Industrial electronics
Measurements
Nanosensors
Precision engineering
Stages
SDGs
Type
conference paper