https://scholars.lib.ntu.edu.tw/handle/123456789/611962
標題: | Development of the nano-measuring machine stage | 作者: | Jywe W.-Y. Jeng Y.-R. Teng Y.-F. Wang H.-S. Wu C.-H. Wen-Yuh Jywe |
關鍵字: | Annual conference;Flexible bodies;Long range;Measuring systems;Moving range;Straightness error;X-Y stage;Electronics industry;Errors;Flexible structures;Industrial electronics;Measurements;Nanosensors;Precision engineering;Stages | 公開日期: | 2007 | 起(迄)頁: | 2970-2973 | 來源出版物: | IECON Proceedings (Industrial Electronics Conference) | 摘要: | In this paper, it was successfully developed a nano-measuring machine stage. It was used the features of a flexible structure to develop the nano-measuring machine stage. This stage includes two parts: one is a long range positioning X-Y stage and the other one is a four degrees-of-freedomicro-range stage. The flexible structure of the four degrees-of-freedom micro-range stage was included two kinds of an arc flexible body and a new two degrees-of-freedom flexible body. The micro-range stage was designed to compensate the moving errors such as vertical straightness error, pitch error and roll errors and its all moving range is 20mm × 20mm × 11μm. Precision feedback is provided by the six degrees-of-freedom measuring system with integrating the three plane mirror interferometers and a two degrees-of-freedom angular sensor. ?2007 IEEE. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-49949093650&doi=10.1109%2fIECON.2007.4460035&partnerID=40&md5=7ba9a81e8a57d86b6497bc42d2fa6fc7 https://scholars.lib.ntu.edu.tw/handle/123456789/611962 |
DOI: | 10.1109/IECON.2007.4460035 |
顯示於: | 機械工程學系 |
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