A novel simple and low cost 4 degree of freedom angular indexing calibrating technique for a precision rotary table
Journal
International Journal of Machine Tools and Manufacture
Journal Volume
47
Journal Issue
12-13
Pages
1978-1987
Date Issued
2007
Author(s)
Abstract
For calibrating an angular rotary table, either a high precision standard table or a laser interferometer and related optics are normally employed at high cost. This paper establishes a novel, simple and low cost technique to calibrate the 4-degrees-of-freedom (DOF) errors of a rotary table (three angular position errors and one linear position error) for a 360° full circle by employing one reference rotary table, one 1 dimensional (1D) grating and two 2 dimensional (2D) position-sensing-detectors (PSD). With this technique, no highly accurate reference rotary table, but with good repeatability is needed. After two full circle tests, the 4-DOF errors of both the target rotary table and the reference rotary table could be obtained. The system calibration, stability test, system verification and full circle test were completed. The angular stability of this system was less then 2 arc sec, while the displacement stability was less than 1.2 μm. ? 2007 Elsevier Ltd. All rights reserved.
Subjects
Calibration
Cost effectiveness
Diffraction gratings
Error analysis
Indexing (materials working)
Error separation
Position sensing detector
Rotary table
Rotary table calibration
Stability test
Degrees of freedom (mechanics)
SDGs
Type
journal article