https://scholars.lib.ntu.edu.tw/handle/123456789/611976
標題: | Development of a laser based dual-axial five-degrees-of-freedom measurement system for an X-Y stag | 作者: | Jywe W.-Y. Liu C.-H. Teng Y.-F. Chen C.-J. Shen J.-C. Hsieh W.-H. Wang Y.-C. Wen-Yuh Jywe |
關鍵字: | Angular errors;Error verification;Laser interferometers;Measurement systems;Degrees of freedom (mechanics);Error detection;Laser applications;Measurement theory;Interferometers | 公開日期: | 2006 | 卷: | 2006 | 來源出版物: | Proceedings of 8th Biennial ASME Conference on Engineering Systems Design and Analysis, ESDA2006 | 摘要: | This paper presents a new precision multi-DOF measurement system which has been developed and implemented for the simultaneous measurement of 5DOF motion errors (two linear positions, as well as pitch, roll and yaw) of an X-Y stage. In this paper, the 3DOF laser interferometer was produced by designing the optical path from the one-degrees-of-freedom laser interferometer. The system employs two three-degree-of-freedom interferometers to detect two position errors and three angular errors of the X-Y stage. The experimental setups and measuring procedure and a systematic calculated method for the error verification are presented in the paper. The resolution of measuring the angular errors component is about 0.055 arcsec. Copyright ? 2006 by ASME. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-33845752071&partnerID=40&md5=05682d96475289e7bcf7d1d2e8cfef52 https://scholars.lib.ntu.edu.tw/handle/123456789/611976 |
顯示於: | 機械工程學系 |
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