|Title:||Development of a laser based dual-axial five-degrees-of-freedom measurement system for an X-Y stag||Authors:||Jywe W.-Y.
|Keywords:||Angular errors;Error verification;Laser interferometers;Measurement systems;Degrees of freedom (mechanics);Error detection;Laser applications;Measurement theory;Interferometers||Issue Date:||2006||Journal Volume:||2006||Source:||Proceedings of 8th Biennial ASME Conference on Engineering Systems Design and Analysis, ESDA2006||Abstract:||
This paper presents a new precision multi-DOF measurement system which has been developed and implemented for the simultaneous measurement of 5DOF motion errors (two linear positions, as well as pitch, roll and yaw) of an X-Y stage. In this paper, the 3DOF laser interferometer was produced by designing the optical path from the one-degrees-of-freedom laser interferometer. The system employs two three-degree-of-freedom interferometers to detect two position errors and three angular errors of the X-Y stage. The experimental setups and measuring procedure and a systematic calculated method for the error verification are presented in the paper. The resolution of measuring the angular errors component is about 0.055 arcsec. Copyright ? 2006 by ASME.
|Appears in Collections:||機械工程學系|
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