https://scholars.lib.ntu.edu.tw/handle/123456789/611979
標題: | Development of a four-degrees-of-freedom diffraction sensor | 作者: | Liu C.-H. Jywe W.-Y. Chen C.-K. Hsien W.H. Shyu L.-H. Ji L.-W. Liu V.-T. Hsu T.-H. Chen C.-D. Wen-Yuh Jywe |
公開日期: | 2006 | 卷: | 48 | 期: | 1 | 起(迄)頁: | 196-201 | 來源出版物: | Journal of Physics: Conference Series | 摘要: | The development of a diffraction-type four-degrees-of-freedom sensor based on the three-dimensional diffraction method and collimation method is described in this paper. This sensor is designed to be integrated with a linear laser encoder to allow five-degrees-of-freedom measurement. It is composed of a miniature collimation-type sensor, a reflective diffraction grating and a quadrant detector to simultaneously measure a straightness error and three rotational angles. Based on the diffraction method, the reflective diffraction grating reflects the incident laser from the collimation-type sensor to several diffractive laser rays and only the 0 and +1-order diffractive laser rays are detected by the collimation-type sensor and a quadrant detector respectively. According to the changed spot positions of the diffraction laser lights on the collimation-type sensor and the quadrant detector, a straightness error and the three rotational errors can be solved simultaneously. ? 2006 IOP Publishing Ltd. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-33947689613&doi=10.1088%2f1742-6596%2f48%2f1%2f036&partnerID=40&md5=98a703dfb120fa87b39f2e360c400f92 https://scholars.lib.ntu.edu.tw/handle/123456789/611979 |
DOI: | 10.1088/1742-6596/48/1/036 |
顯示於: | 機械工程學系 |
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