https://scholars.lib.ntu.edu.tw/handle/123456789/611988
標題: | Integral sliding-mode control of a piezoelectricactuated motion stage | 作者: | Shen J.-C. Jywe W.-Y. Liu C.-H. Jian Y.-T. Deng Y.-F. Yang Y.-T. Wen-Yuh Jywe |
關鍵字: | Design method;Estimation and compensation;First order;Hysteresis nonlinearity;Linear model;Linear system model;Motion stage;Nano-stage;Nonlinear;PID controllers;Precision;Sliding mode controller;Sliding modes;Automation;Design;Hysteresis;Linear systems;Piezoelectricity;Proportional control systems;Sliding mode control;Controllers | 公開日期: | 2005 | 卷: | 16 | 起(迄)頁: | 79-84 | 來源出版物: | IFAC Proceedings Volumes (IFAC-PapersOnline) | 摘要: | This paper presents the design of an integral sliding-mode controller for a piezoelectric-actuated system. The sliding-mode disturbance (uncertainty) estimation and compensation scheme is used. The nonlinear piezoelectric-actuated system is modeled as a first order linear model coupled with a hysteresis. When the model is identified, the hysteresis nonlinearity is linearized then the linear system model with uncertainty is used to design the sliding-mode controller. The structure of the proposed controller is as simple as the PID controller. Thus, it can be implemented easily. This design method is applied to the motion control of a nano-stage and experimental results are presented. Copyright ? 2005 IFAC. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-79960736838&partnerID=40&md5=9d89ebb6821d688d15a5b715208a1637 https://scholars.lib.ntu.edu.tw/handle/123456789/611988 |
顯示於: | 機械工程學系 |
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