https://scholars.lib.ntu.edu.tw/handle/123456789/61427
Title: | A measurement system for the geometric accuracy of X-Y stages in 6 d-o-f | Authors: | 范光照 Chen, M.J. Fan, K. C. |
Issue Date: | Aug-1999 | Start page/Pages: | - | Source: | Keynote paper | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/156426 |
Appears in Collections: | 機械工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.