Piezoreflectance study of an Fe-containing silicon carbon nitride crystalline film
Journal
Journal of Applied Physics
Journal Volume
87
Journal Issue
1
Pages
280-284
Date Issued
2000
Author(s)
Abstract
A detailed piezoreflectance (PzR) study of an Fe-containing silicon carbon nitride crystalline film in the temperature range between 15 and 580 K was performed. From the line shape fit of the PzR spectra, the impurity to band and the direct band-to-band transition energies which are denoted as Ei and Edg, respectively, at various temperatures were accurately determined. The parameters that describe the temperature dependence of Ei and Edg are evaluated and discussed. © 2000 American Institute of Physics.
Type
journal article