https://scholars.lib.ntu.edu.tw/handle/123456789/616434
標題: | High current density field emission from arrays of carbon nanotubes and diamond-clad Si tips | 作者: | Tarntair F.G. Chen L.C. Wei S.L. Hong W.K. Chen K.H. Cheng H.C. LI-CHYONG CHEN |
公開日期: | 2000 | 卷: | 18 | 期: | 3 | 起(迄)頁: | 1207-1211 | 來源出版物: | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 摘要: | Carbon-based emitter arrays with well-separated cells of μm scale were fabricated and their field emission properties were characterized. Carbon nanotubes grew on top of the metal layer in the array but not on the plain Si substrate. The fabrication process of patterned template is well established and is applicable for large area process. The synthetic approach proposed is well within the capabilities of the IC industry for automation and scale up production of practical devices. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0034187896&doi=10.1116%2f1.591362&partnerID=40&md5=e45e5d22654012eec1b6e744de5a2688 https://scholars.lib.ntu.edu.tw/handle/123456789/616434 |
ISSN: | 10711023 | DOI: | 10.1116/1.591362 | SDG/關鍵字: | Atomic force microscopy;Auger electron spectroscopy;Carbon;Cladding (coating);Current density;Nanotubes;Plasma enhanced chemical vapor deposition;Scanning tunneling microscopy;Semiconducting diamonds;Semiconducting silicon;Semiconductor growth;Substrates;Diamond-clad silicon tips;Field emitter arrays;Fowler-Nordheim theory;Field emission cathodes |
顯示於: | 凝態科學研究中心 |
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