https://scholars.lib.ntu.edu.tw/handle/123456789/616464
Title: | Micro-Raman for diamond film stress analysis | Authors: | Chen K.H. Lai Y.L. Lin J.C. Song K.J. Chen L.C. Huang C.Y. LI-CHYONG CHEN |
Keywords: | Diamond;Raman spectroscopy;Stress | Issue Date: | 1995 | Journal Volume: | 4 | Journal Issue: | 4 | Start page/Pages: | 460-463 | Source: | Diamond and Related Materials | Abstract: | The residual stress in microwave plasma-enhanced CVD diamond film was analyzed using a Raman spectrometer with micrometer spatial resolution. This enables effective study of isolated crystals grown in the same deposition run. A variation of the Raman line shape near 1332 cm-1 was observed from different crystals in the same sample. A phenomenological model was used to describe the shift and splitting of the diamond Raman line, from which the type and the magnitude of the stress in PECVD grown diamond can be assessed. The interrelationship and the origin of the stress in the film is discussed. © 1995. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0000388583&doi=10.1016%2f0925-9635%2894%2905319-7&partnerID=40&md5=825e23820948cc1710c3da5a84eb3f73 https://scholars.lib.ntu.edu.tw/handle/123456789/616464 |
ISSN: | 09259635 | DOI: | 10.1016/0925-9635(94)05319-7 |
Appears in Collections: | 凝態科學研究中心 |
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