https://scholars.lib.ntu.edu.tw/handle/123456789/625181
標題: | Ferroelectric enhancement of Al-doped HfO2 thin films by rapid electron beam annealing in a low thermal budget | 作者: | Wang T.-Y Kao W.-C Yin Y.-T TZONG-LIN JAY SHIEH MIIN-JANG CHEN |
關鍵字: | Al-doped HfO2; Electron beam annealing; Ferroelectricity; Interdiffusion; Thin film | 公開日期: | 2022 | 卷: | 42 | 期: | 10 | 起(迄)頁: | 4221-4226 | 來源出版物: | Journal of the European Ceramic Society | 摘要: | In past few years, there was a great amount of research on ferroelectric Al-doped HfO2 (HAO) thin films which suffer from the need of high annealing temperatures to achieve significant ferroelectricity. In this work, we realize pronounced remnant polarization 2Pr~29μC/cm2 of HAO using rapid electron beam annealing (EBA) with a large area. The simulation of electron beam trajectories reveals that the effect of EBA concentrates on the region ~20 nm below the sample surface, which highly benefits the process integration where a low thermal budget is required. The energy-dispersive X-ray and high-angle annular dark-field analyses reveal the interdiffusion between Al and Hf in the HAO layer treated by EBA. The pronounced ferroelectricity of HAO can be accounted for by the lattice strain, which facilities the formation of the orthorhombic phase, due to the substitution of Al for Hf as supported by the fast Fourier transformation diffraction pattern. © 2022 |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85127645754&doi=10.1016%2fj.jeurceramsoc.2022.03.064&partnerID=40&md5=9d4dc4827d93f258e34607de14303632 https://scholars.lib.ntu.edu.tw/handle/123456789/625181 |
ISSN: | 09552219 | DOI: | 10.1016/j.jeurceramsoc.2022.03.064 | SDG/關鍵字: | Aluminum compounds; Budget control; Electron beams; Electrons; Ferroelectric films; Ferroelectricity; Hafnium; Hafnium oxides; Al-doped; Al-doped HfO2; Annealing temperatures; Electron beam annealing; Electron beam trajectory; Interdiffusion; Low thermal budget; Remnant polarizations; Sample surface; Thin-films; Thin films |
顯示於: | 材料科學與工程學系 |
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