https://scholars.lib.ntu.edu.tw/handle/123456789/62591
Title: | 玻璃基板上壓電薄膜之阻抗分析 Impedance of Piezoelectric Film on Glass Substrate |
Authors: | 林千靖 Lin, Chian-Jing |
Keywords: | 阻抗;邊界元素法;有限元素法;impedance;boundary element method;finite element method | Issue Date: | 2006 | Abstract: | 表面聲波元件的使用越來越廣泛,使用的指叉轉能器種類也越來越複雜。本文利用邊界元素法結合有限元素法建立分析程式,做半無限域玻璃基板上壓電薄膜的阻抗分析。 有限元素法是一種發展成熟,最廣泛使用的數值方法,然而有其使用的限制存在,例如處理無限域問題時就必須面臨大量元素分割或特殊邊界條件的問題;邊界元素法由於其基本解為無限域的基本解,適合處理無限域問題。本文用邊界元素法處理半無限域玻璃基板部分,而以有限元素法處理壓電薄膜部分,結合兩種理論進行阻抗分析。 分別建立邊界元素法程式與有限元素法程式,確認兩種方法正確無誤;最後結合兩種方法,與文獻阻抗值做比較。由本文的研究發現,模擬結果阻抗值與文獻不符,但是改變尺寸對阻抗值影響的效應則與文獻推導大致相同。 利用微機電製程製作指叉轉能器,與模擬結果作比較,發現兩種結果差異很大,還需要去探究其原因。 The use of SAW devices has become more popular, while different types of IDT have been developed. We built a program with finite element method and boundary element method to determine the impedance of piezoelectric film on glass substrate. FEM is one of the most popular and mature numerical methods. However, there are still some restrictions within FEM. For example, a lot of elements or special boundary conditions are needed when we analyze the problem of infinite domain. BEM suits to solve the problem of infinite domain because its fundamental solution is the Green function of infinite domain. We analyzed the semi-infinite glass substrate by BEM and the piezoelectric film by FEM. We then coupled the two methods to determine the impedance. We built the programs for FEM and BEM individually, and confirmed the accuracy of them. Finally, we coupled the two methods to calculate the impedances and compared them with the references. The values of the impedances do not agree with the references, but the effects of changing the sizes of IDT are consistent with the references. We manufactured IDT by MEMS technology. The results are much different from those of the programs, and the reason should be further discussed. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/61353 | Other Identifiers: | zh-TW |
Appears in Collections: | 機械工程學系 |
File | Description | Size | Format | |
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ntu-95-R92522526-1.pdf | 23.53 kB | Adobe PDF | View/Open |
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