https://scholars.lib.ntu.edu.tw/handle/123456789/629900
標題: | CMOS-Embedded 3D Micro/Nanofluidics Employing Top-Down Beol Single-Step Wet-Etching Technique | 作者: | Weng, Wei Yang Hou, Hung Yu Chao, Yueh Jung SHWU-JEN LIAW JUN-CHAU CHIEN |
關鍵字: | cellular detection | CMOS | microfluidics | nanofluidics | resistive pulse sensing | top-down BEOL etching | 公開日期: | 1-一月-2023 | 卷: | 2023-January | 來源出版物: | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | 摘要: | This paper presents CMOS-embedded 3D micro/ nanofluidics for next generation point-of-care (POC) diagnostic devices. We take advantage of the fine line metallization in modern CMOS technology and create 3D micro/nanofluidics through the removal of the metals from the routings using a single-step post-CMOS wet-etching process. We demonstrate the method in both 180-nm and 65-nm CMOS chips with aluminum and copper back-end-of-line (BEOL), respectively. Various fluidic geometries are investigated including (1) a four-channel fluidic splitter; (2) a 3D fluidic channel; and (3) a width-varying channel for resistive pulse sensing (RPS). We also study the impact of etchants on the transistor characteristics and demonstrate functional circuit operation using a 32-bit shift register after prolong etching. Last, we demonstrate resistive pulse sensing in our CMOS-embedded microfluidics. This work presents the first demonstration of CMOS-embedded micro/nanofluidics for biomedical applications. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/629900 | ISBN: | 9781665493086 | ISSN: | 10846999 | DOI: | 10.1109/MEMS49605.2023.10052329 |
顯示於: | 電機工程學系 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。