https://scholars.lib.ntu.edu.tw/handle/123456789/630030
標題: | Study of snap-through behavior of a bistable mechanism for a MEMS optical switch | 作者: | YING-YIN HUANG YAO-JOE YANG |
關鍵字: | Bi-stable | MEMS | Optical switch | Snap-through | Transient | 公開日期: | 23-八月-2007 | 卷: | 3 | 來源出版物: | 2007 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2007, Technical Proceedings | 摘要: | In this work, we present the study of both the transient and static behaviors of a bi-stable mechanism which will serve as the switching mechanism for an optical switch. The major part of the bi-stable mechanism consists of two constrained curved structures (the double-curved beam). The device modeled in this work is fabricated using a simple SOI process. As the applied force exceeds a critical value, the double-curved beam snaps through to the other stable state. We use the finite element method (FEM) to simulate both the static and transient snap-through behaviors of the bi-stable mechanism. Also, the simulated results will be compared with the measured results to study the influence of post-snap-through dynamics on the optical performance of the optical switch. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/630030 | ISBN: | 1420063421 |
顯示於: | 機械工程學系 |
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